Can someone confirm the news that China has started mass-producing DUV? Or is it the rehash story about EUV light sources?
The Ministry of Industry and Information Technology officially announced the commercial production of DUV lithography machines two days ago. Today, the patents for EUV light sources and lithography equipment were revealed, and they were applied for on March 9, 2023.
The Ministry of Industry and Information Technology officially announced the commercial production of DUV lithography machines two days ago. Today, the patents for EUV light sources and lithography equipment were revealed, and they were applied for on March 9, 2023.